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法等[5]。 1.1.等离子体法 等离子体法是通过激活载气携带的原料形成等离子体，再加热反应生成超微粒子的方法。以ticl4为原料，氢气为载气，氧气为反应气体，应用频率为245
http://blog.alighting.cn/weking1/archive/2009/11/17/19524.html2009/11/17 17:25:00
